人物經歷
謝建兵,生於1980年11月,研究生、博士學位,現任西北工業大學空天微納系統教育部重點實驗室副教授 。
研究方向
主要研究方向為微機電系統慣性感測器設計及微機械加工工藝技術,設計開發了多種微機械陀螺、微加速度計,申請國家發明專利25項,授權16項。
主要貢獻
1) Jianbing Xie, yongcun Hao, qiang Shen, Honglong Chang and weizheng Yuan, A dicing-free SOI process for MEMS devices based on the lag effect, Journal of Micromechanics and Microengineering, 23 (2013) 125033, doi:10.1088/0960-1317/23/12/125033 (SCI, EI)
2) Jianbing Xie, Qiang Shen, Yongcun Hao, Honglong Chang, Weizheng Yuan, Design, fabrication and characterization of a low-noise Z-axis micromachined gyroscope, Microsystem Technologies, doi: 10.1007/s00542-014-2068-0, 2014(SCI, EI)
3) Jianbing XIE, Weizheng YUAN, Honglong CHANG, Design and Fabrication of MEMS Gyroscopes on the SOI Substrate with Decoupled Oscillation Modes, Chinese Journal of Mechanical Engineering, vol 23. 2010(1). pp. 16-20. (SCI, EI)
4) Jianbing XIE, Yongcun HAO, Honglong CHANG, Weizheng YUAN, Single Mask Selective Release Process for Complex SOI MEMS Device, Key Engineering Materials, vol.562, pp1116-1121, 2013 (EI)
5) XIE Jianbing, SONG Meng, YUAN Weizheng , A high sensitivity micromachined accelerometer with an enhanced inertial mass SOI MEMS process, Proceedings of 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), pp336-339, Suzhou, China, 2013.04.07-10 (EI)
6) Jianbing XIE,Weizheng YUAN,Honglong CHANG,The application of notching effect in one-step dry etch and release process for the fabrication of MEMS, Nanotechnology and Precision Engineering,vol 8. 2010(2). pp. 167-170. (EI)
獲獎記錄
1. MEMS集成設計工具技術及套用, 陝西省科學技術一等獎,2009.
2. 任意流程的微機電系統設計工具技術及套用, 中國機械工業科學技術一等獎,2008.
